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Standard batch type sputtering equipment - List of Manufacturers, Suppliers, Companies and Products

Standard batch type sputtering equipment Product List

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Standard Batch Type Sputtering Device (SRV Series)

Multi-functional, compact, flexible support, a standard lineup with proven results and trust.

A standard batch-type sputtering series that incorporates a three-element cathode into a compact housing. It covers the film deposition process for various electronic devices and related materials from basic development to mass production, thanks to a wide uniform range of film thickness distribution and an automatic control mechanism. Our film deposition processes and options, supported by numerous delivery records, will reliably meet your requirements.

  • Sputtering Equipment
  • Plasma surface treatment equipment

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